Used GASONICS Aura 1000 #293811532 for sale

GASONICS / NOVELLUS Aura 1000 is a class of etcher/ash equipment used in the semiconductor integrated circuit (IC) manufacturing. This Etcher/Asher system has been designed to perform precision plasma etching and chemical vapor deposition (CVD) processing. It has an excellent accuracy for etching and depositing materials on large and small-sized wafers. The unit has two independent source chambers and a loadlock chamber to handle various material deposition. It has a high-precision XYZ stage to provide accurate linear and angular motions for etching and CVD process. It also has an additional Rotary drive that can rotate wafers up to 300 degrees for easy and precise alignment. The Plasma Etcher/Asher has a reactive ion etching (RIE) chamber that has a vacuum range of 0.005-25 torr and a pressure range of 5-1000 mTorr. It has a powerful RF power source to support high-density plasma etching, with a power range up to 75 kW. The deposition rate is adjustable, ranging from 0.001-1.8 μm per minute. GASONICS Aura 1000 has advanced plasma control features, such as advanced plasma shaping, step-etching and slit-etching technology. It also has advanced wafer handling and safety features, such as an alarm mechanism to alert the machine when the wafers are not properly secured and RF-sensing to reduce the risk of electrical arc and fire. NOVELLUS Aura 1000 Etcher/Asher is a highly reliable tool for IC manufacturing as it offers high accuracy, flexibility, and repeatability. The asset can be controlled through a graphical user interface (GUI), allowing operators to intuitively control process parameters and monitor their progress in real-time. This model is compatible with various advanced technologies, such as memory and logic devices, MEMs and displays.