Used GASONICS Aura 1000 #293827649 for sale

GASONICS / NOVELLUS A 1000 is a semiconductor asher / etcher designed for advanced plasma etching and deposition processes. It features a large-capacity process chamber that can accommodate over 50 wafers in a standard 8-inch, 300mm wafer cassette. The chamber is pressurized, allowing for optimal gas management and reduced process contaminants. The machine is also outfitted with a robot that can handle complex processes, and provides multiple-axis motion with high reliability and repeatability. GASONICS A 1000 is powered by state-of-the-art microprocessor and control logic, executing complex processes with precision. Digital data that governs the process is written in a commonly-used GASONICS plasma language (GPL) which is tailored for each process. NOVELLUS A1000 also features NOVELLUS SPC-1000™ software, providing a graphical user interface (GUI) for monitoring and controlling the process. The SPC-1000™ enables the operator to monitor, control and adjust parameters in real-time while a process is underway, as well as storing recipes, data and results. The base GASONICS / NOVELLUS A1000 model comes with an inductively coupled plasma source and diode-sensing electron beam source, enabling fast pulsing and high-rate deposition with sophisticated uniformity control and superior material quality. Pwner selectable process gases, including forms of oxygen and nitrogen, allow for cleaning, oxidation, deposition and etching of materials. The machine also includes a turbopump system consisting of a two-stage rotary sieving pump and a low-maintenance turbo pump. In addition to standard etching and deposition capabilities, A 1000 also offers options for pre-etch cleaning, post-etch cleaning, passivation and stripping processes. By combining etch and deposition processes in a single tool, GASONICS A1000 offers an efficient and reliable approach to device fabrication technology. With its sophisticated process control and many high-performance features, NOVELLUS A 1000 can provide superior results and a high degree of control.