Used GASONICS Aura 1000 #293827650 for sale

GASONICS / NOVELLUS Aura 1000 is an etcher / asher that is commonly used in semiconductor fabrication processes. It is a multi-chamber system with a large main etch chamber, a load lock chamber, and a clean chamber. It contains an ultra-violet light source and uses a proprietary ion beam etch technique to deliver precise etching results. It features a high aspect ratio deep etch capability, with a narrow margin of error and accuracy of +/-15nm. It can be used to deep etch features down to 2um width and 2um depth. It is capable of processing a variety of materials, including silicon, aluminum, copper, and tungsten. The iterative scan mechanism allows for high throughput etching of wafers. It is able to scan larger wafers with a single pass in approximately 3 minutes, reducing time and cost of operations. It is also equipped with a dual wafer shuttle wagon, allowing for increased wafer input and output capabilities. An advanced user interface helps users to adjust parameters such as pressure, voltage and current for optimum etch results. GASONICS Aura 1000 is known for its precise etching methods and excellent repeatability. With its high level of accuracy, NOVELLUS Aura 1000 is ideal for high precision pattern transfer, die-on-die stacking, and others types of complex etching applications. It is widely used in semiconductor, solar, automotive, and consumer electronics applications. Aura 1000 has numerous advanced features to help ensure quality etching results. These features include closed loop calibration and control, high voltage surge protection, protective shields, precise temperature and pressure control, and automatic wafer alignment. In conclusion, GASONICS / NOVELLUS Aura 1000 is an advanced etcher / asher designed with precision and reliability in mind. It is known for its high aspect ratio deep etch capability, high throughput scan mechanism, and numerous advanced features. GASONICS Aura 1000 is a versatile and reliable tool that can be put to use in a variety of different applications.