Used GASONICS Aura 1000 #293831504 for sale

GASONICS/GASONICS / NOVELLUS Aura 1000 is an advanced etcher/aser equipment designed for high-volume production of nanometer-scale integrated circuits. The system is capable of etching and ashing features with dimensions as small as 10nm, and is built on a highly reliable and modular architecture that can be adapted to a wide range of applications. The unit utilizes advanced technology to enable the highest yields and the most accurate etching and ashing of the most complex features. It can be used to create transistors and other electrical components with nanometer-scale dimensions. The machine comes with advanced control software that provides real-time visualization of the etching and ashing process to ensure that the desired feature geometry is produced each time. The tool includes automatic and semi-automatic cleaning systems, along with FOUP (Front Opening Unified Pod) and POAT (Polish and Oxide Application Tray) loading and unloading systems to ensure continuous and efficient operation. The asset is also powered by an advanced 2.5 kW ion source that can be tuned to provide optimal etching and ashing results. NOVELLUS/GASONICS Aura 1000 also features advanced contamination control features, such as an RF self-cleaning model and dedicated particle filters. The equipment maintains a cleanroom environment and minimizes the risk of contamination and particle damage. This ensures a high-yield production of nanometer-scale integrated circuits. In addition to its advanced features, the system is designed for maximum uptime and reliability, with high-level support for maintenance and repair. The unit is also designed to be flexible and scalable, so it can be used for a wide range of high-volume applications. With its high level of automation, software control, and advanced etching/ashing technology, GASONICS / NOVELLUS/NOVELLUS Aura 1000 is an ideal etching/ashing machine for high-volume production of nanometer-scale integrated circuits.