Used GASONICS / BRANSON / IPC 9104 #9196372 for sale
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ID: 9196372
Wafer Size: 4"-6"
Plasma asher, 4"-6"
P/N: 15698-02
QUARTZ Chamber
With ENI OEM-12B-06 RF Generator
Power control
BIS 15677-02.
GASONICS / BRANSON / IPC 9104 is an advanced etcher/asher designed for sustaining high throughput, high yields, and high quality results within medical, optical, and other industries. The etcher/asher features multiple source liquid jets for etching, cleaning, and functionalizing Si, metals, glass, and many other substrates. IPC 9104 uses a proprietary Active Temperature Control Equipment to provide the optimal process temperature and uniformity for etching and ashing. This system also allows for rapid process changes and precise process control during etching and ashing. Additionally, this etcher/asher boasts an advanced digital Vibrasonic agitation unit that ensures a consistent etch/ash profile and superior uniformity and surface. Its advanced digital Vibrasonic agitation machine helps to eliminate unwanted reaction products and minimize defects and variability. BRANSON 9104 is also powered by an advanced analog NiS/InS configured PC platform. This PC platform enables remote process monitoring, recipe storage and editing, statistical process control, and archiving of process histories. Additionally, the powerful NiS/InS platform allows for process customization and optimization across multiple process parameters. 9104 is the ideal solution for users seeking high throughput, high yields, and high quality results from etching and ashing processes. Thanks to its advanced digital Vibrasonic agitation tool, Active Temperature Control Asset, and powerful NiS/InS configured PC platform, this etcher/asher produces consistent results at the highest levels of performance. Additionally, its design allows for process customization and optimization, and it is easy to operate for users of all types.
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