Used GASONICS / NOVELLUS 2000 II #9093681 for sale

GASONICS / NOVELLUS 2000 II is an etcher/asher used for the production of electronic products. The machine has a substrate size of up to 254 mm (10") with a pattern area of up to 81 cm2 (12.6" x 6.4"). It can etch metals, dielectrics, alloys, Parylene coatings and hard-baked photoresists. GASONICS 2000 II utilizes GASONICS patented technology called COST Beam (Controlled Sputter through Etch) for plasma etching. The machine is designed for high throughput combined with fast and precise process control. It is also equipped with an automatic BOOST Beam for enhancing plasma etch processes. NOVELLUS 2000 II has a process pressure range of 1-4 mTorr in the process chamber, and a process time of up to 20 minutes. It has a high-speed critical dimension (CD) accuracy of 3.2 µm or better. An optional array of sources can be used to extend the machine's etching capability. This includes a high-power CEM laser source, DC-sputter source, OES or Electron Cyclotron Resonance (ECR) plasma source. Process temperature control is coupled with advanced cooling option including a combination of evaporation-based cooling and downward convection cooling. 2000 II is a full-metal dual stage platform with an integrated substrate heating system and fast-flow gas delivery. Process chamber volumes of 2 litres (Low Pressure Etch) and 4.85 litres (High Pressure Etch) can be used for etching processes. GASONICS / NOVELLUS 2000 II incorporates process monitoring equipment that includes a Laser Spectrometer, Real Time Particulate Monitor and a Rear View Optical Profiler. The LT product can be used for advanced process control. It is equipped with a Benchtop Vision System for improved process control. GASONICS 2000 II is an ideal tool for etching a wide range of materials, from silver, copper alloys and Parylene coatings, for use in advanced production processes. With its high accuracy, process control and monitoring equipment, the machine is an ideal choice for producing highly complex patterns with minimal waste.