Used GASONICS / NOVELLUS 9102 #9151439 for sale
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GASONICS / NOVELLUS 9102 etcher / asher is a high-precision die-level material etching tool. It provides high-accuracy material removal capabilities for a wide range of commercial, industrial and medical applications. The equipment utilizes a pulsed laser beam for material etching and removal, and operates by pumping cold nitrogen gas through the laser beam to protect surrounding surfaces and components from heat damage. It has been utilized in the production of MEMS and semiconductor devices, as well as in medical device fabrication and lab-on-a-chip devices. GASONICS 9102 is designed for etching curves, lines, patterns and features into workpieces without harming delicate underlying features. The system is programmable and can process multiple dies at once. It is also capable of handling a variety of materials such as glass, silicon, patents, ceramic, and metals. The machine is equipped with a high-precision, F-Theta focusing unit, allowing for complex structures and sub-micron Lithography to be performed. NOVELLUS 9102 is a reliable, fast and efficient etcher, providing superior quality patterns and features. It has a small footprint of just 10ft2, enabling it to be used in research facilities and laboratories. Its highly automated design supports unattended etching and material applications. Its powerful capabilities are further enhanced by its real-time laser control, delivering single frequency energy pulses as short as 10 nanoseconds in duration. 9102 has a simple user interface and provides excellent thermal control, enabling uniform etching depths. It also offers gas blending capabilities for fine material removal and fine-tuned etching control. The innovative machine has a fast processing speed, making it an efficient choice for industrial and medical applications. Thanks to its robust construction and reasonable price, it is increasingly becoming the preferred choice among researchers and commercial engineers alike.
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