Used GASONICS / NOVELLUS 9102 #9238248 for sale

GASONICS / NOVELLUS 9102 is an etcher / asher equipment designed for micro-fabrication and nanofabrication applications. This machine is used for thin film etching and material sputtering to create small-scale features on a substrate. GASONICS 9102 is equipped with two high powered KrF laser capable of etching 25nm features on substrates up to 4 inches in diameter. Additionally, NOVELLUS 9102 is equipped with up to 4 cryogenic delivery systems and 4 etching/sputtering sources. 9102 is highly automated and features an easy-to-use Graphical User Interface (GUI) that enables users to quickly set up their etching process. GASONICS / NOVELLUS 9102 has multiple process control functions including optical monitoring, pressure, temperature, and others. The system is also equipped with auto-restart capabilities and a dynamic thermal control unit. GASONICS 9102 is available with a variety of process chambers including single chamber, dual chamber, and single module chamber with a large load lock chamber. More complex systems are available with multiple chambers and large chamber sizes. NOVELLUS 9102 is capable of etching/sputtering at an exceptionally high rate of speed, which is particularly beneficial for high-volume applications. 9102 works well with various substrates including metals, semiconductors, glasses, alloys, ceramics, and organic materials. Moreover, the Windows-based GUI software allows for real-time process monitoring and optimization for maximum production efficiency. GASONICS / NOVELLUS 9102 has a layer thickness accuracy of 0.5% or better and a repeatability of 0.3%. In summary, GASONICS 9102 etcher / asher is a versatile machine that combines speed and accuracy to enable high-precision micro- and nano-fabrication. Its high-powered laser and dynamic thermal control tool make it a reliable tool in the production process. NOVELLUS 9102 is easy to use with its user-friendly GUI and is compatible with a wide variety of substrates.