Used GASONICS / NOVELLUS AE 2001 #293597599 for sale

GASONICS / NOVELLUS AE 2001 is an etcher/asher system designed for processing a variety of materials, specifically in semiconductor device fabrication. This machine is used to perform a variety of etching and ashing operations, such as deep-etch, hydrofluoric etch, sulfide etch, plasma etch, and others. It is equipped with a multi-zone dynamic process control in order to allow for precise temperature and pressure control to enable optimal processing. GASONICS AE 2001 is constructed from a machined aluminum base. It features a vacuum chamber, with a vacuum pump and valve, as well as a control panel built in to the front. The process chamber also has two robots for loading and unloading parts, as well as two heater elements to facilitate process heating. The machine also features two chemical delivery systems, one for supplying etching chemicals and one for supplying ashing chemicals. NOVELLUS AE2001 can process a variety of materials including metal alloys, dielectrics, and polymers. It is engineered to provide consistent results with an acceptable chemical uniformity, high resolution, and high accuracy. It also has an on-board digital camera system used to monitor the process to ensure one-dimensional results. AE 2001 has a wide range of capabilities and processes, including deep-etch, hydrofluoric etch, sulfide etch, plasma etch, dry etch, chemical etch, and more. Each of these processes is capable of being automated and processed with the same precision and accuracy. The process chamber is designed to enable safe and quiet operation, as well as being simple to maintain and clean. AE2001 is a reliable and versatile etcher/asher that is suitable for a wide range of materials. With its multi-zone dynamic process control, automatic controls such as shutter timing, and the ability to etch and ashe in the same cycle, GASONICS AE2001 can be an invaluable tool in any device fabrication process. Its reliable and accurate results, combined with its easy maintenance and operation make it an ideal choice for many applications.