Used GASONICS / NOVELLUS Aura 1000 #293594312 for sale

GASONICS / NOVELLUS Aura 1000 is a state-of-the-art etcher/asher designed to deliver advanced, high precision processes for sub-45nm device fabrication. A conventional etcher is used to sculpt away unwanted areas of a substrate, while an asher uses a chemical process to conform a film to a substrate, providing the ability to "etch" to very fine, uniform detail. GASONICS Aura 1000 combines the precision of an asher with the efficiency of a conventional etcher to provide a solution optimized for high performance, low cost, and flexibility. NOVELLUS Aura 1000 uses two magnetic filters to deliver precisely tuned and matched etching and ashing technology. The first filter is a vacuum source-path that allows production of ultra-fine etching of structures with resolutions down to 37.5nm. This is currently the best resolution available in this class of etch/ash systems. The second filter is an inert gas source-path to support conformal ashing at resolutions below 45nm. Aura 1000 also features an in situ surface observation equipment that employs optical beam imaging coupled with a digital CCD camera. This system provides inline monitoring of the surface profile and allows adjustment of etching conditions to enable enhanced accuracy, resolution, and repeatability. The device also supports photo-resist trace etching for etching nitride, polysilicon, and copper layers as well as many other materials. Multi-level processing capability is another feature of GASONICS / NOVELLUS Aura 1000. The unit allows for full parallel processing of multiple layers in one cycle, with up to 12 levels of etch/ash. This allows for maximum flexibility in matching etch/ash conditions from one substrate to another. Finally, GASONICS Aura 1000 offers a variety of process modules that allow for rapid adaptation for other etch/ash processes. The modules provide the user with an increased level of flexibility, as well as the ability to achieve higher throughput without having to perform additional setup work. In summary, NOVELLUS Aura 1000 is an innovative etcher/asher optimized for high performance, low cost, and flexibility. Its two magnetic filters and its in situ surface observation machine make it a leading-edge device that provides unmatched resolution and repeatability. The multi-level processing capability and process modules also make it an ideal choice for a wide variety of applications.