Used GASONICS / NOVELLUS Aura 1000 #293619545 for sale

GASONICS / NOVELLUS Aura 1000
ID: 293619545
Wafer Size: 6"
Vintage: 1994
Asher, 6" 1994 vintage.
GASONICS / NOVELLUS Aura 1000 is a high-end etcher and asher designed to produce high-precision components down to nanometer resolutions. GASONICS Aura 1000 is capable of generating very fine features, making it ideal for applications that require high precision and extreme accuracy. The equipment can etch and ash down to depths as small as 10nm, allowing for extremely detailed and intricate designs. NOVELLUS Aura 1000 has a flexible production-line to handle a wide range of applications. It can be programmed to etch and ash metals, ceramics, and semiconductor materials like silicon. The system is equipped with a precision control chamber, providing constant reliable temperature and pressure control necessary to produce excellent results. The process is enclosed in an enclosed unit environment, making it safe and clean. Aura 1000 is equipped with advanced proprietary components that enable high precision and repeatability. These components include an etch chamber, a gas injector, a showerhead-like structure for gas distribution and a PAVG source supply. The combination of these components allows for complicated 3D structures and fine features. The integrated software of the machine allows for the creation of complex paths and machine-specific processes, making it easier to access production records and ensure the quality of manufactured components. It also offers visual verification of the etched pieces through the automatic inspection tool. With an exceptional level of accuracy, speed, and efficiency, GASONICS / NOVELLUS Aura 1000 is ideally suited for automotive, aerospace, and medical industries. It is designed to take feature sizes down to nanometer resolutions, enabling the fabrication of unique components in a shorter lead time. The asset provides an efficient production line for high-value, high-precision parts.
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