Used GASONICS / NOVELLUS Aura 1000 #293619546 for sale

GASONICS / NOVELLUS Aura 1000 is a high-end etcher/asher used in advanced microfabrication and semiconductor manufacturing processes. With its multi-stage architecture, GASONICS Aura 1000 provides an unparalleled combination of precision control, high uniformity, and throughput. Its advanced technologies can be adapted to meet the challenges of modern device production, including tight tolerances and uniformity of feature size and geometry. NOVELLUS Aura 1000 architecture is designed to provide the maximum processing flexibility while optimizing production throughput. It features a multi-axe mechanical platform that provides a stable and uniform process environment over the entire cycle, with minimal vibrations. Its motorized drive and automation enable process integration and high-level control of recipes. Built-in diagnostics enable quick feedback on equipment performance and accuracy. Aura 1000 offers numerous choices of chemistries and deposition materials, allowing users to create a wide range of geometries and other features. It can also support different sources of radiant energy and adjustable heater plates, providing a unique environment to maintain optimal process parameters. The system is capable of processing a wide range of substrate materials such as quartz, silicon wafers, metal alloy foils, and organic polymer substrates. GASONICS / NOVELLUS Aura 1000 is extremely user-friendly, featuring an intuitive graphical user interface (GUI). It can be remotely operated from any web-enabled device, and its built-in scalable data acquisition unit allows for connecting to other automation systems, databases, and software packages. With support for multiple sequence files, it enables process optimization for different applications. GASONICS Aura 1000's high-speed motorized wafer chucking machine, along with advanced protective measures, help to reduce cycle times, allowing the tool to produce higher yields at faster speeds. Its multiple process channels and optional in-situ imaging asset allow for concurrent processing of multiple substrates. The advanced automation ensures consistent results and optimal performance. NOVELLUS Aura 1000 is ideal for producing cutting-edge nano- and micro-scale fabrication. With its high-end features and intuitive user interface, it offers an unprecedented mix of precision control and high throughput, allowing users to navigate the challenges of modern semiconductor processes.