Used GASONICS / NOVELLUS Aura 1000 #293621802 for sale

GASONICS / NOVELLUS Aura 1000 is an advanced etcher/asher equipment, designed for use in the production of semiconductor-based components. This system is capable of etching, cutting and other processes. It is capable of thermally processing wafers up to 8 inch in size and utilizing a broad range of technologies, such as RF etching, sequential etching, 2-channel etching, and combinations of previously mentioned techniques, GASONICS Aura 1000 is a powerful etch/asher unit for use in the production, development, and research of semiconductor products. NOVELLUS Aura 1000 utilizes a range of gas distribution systems to improve the accuracy and consistency of hard etching processes, allowing for finer resolution and cleaner etch profile across larger and uniform sizes of semiconductor substrates. The unit is designed to provide precise temperature control of the etch/asher chamber from precise temperature settings, ensuring that precise etching processes can be achieved. In addition, the unit has an advanced thermal-jet ventilation machine that provides uniform cooling of the process chamber and substrate during the entire etching process, preventing substrate overheating and energy waste. Aura 1000 also includes a gas-manipulation module, capable of adjusting gas pressure and composition across a wide range of gases within the etch/asher chamber. This allows the user to fine-tune the gas composition on the fly while ensuring etch/asher process parameters remain consistent over the duration of the substrate's processing. In addition to its etching/ashing capabilities, GASONICS / NOVELLUS Aura 1000 provides a range of additional useful functions. Its high-voltage, high-power pulse generator is capable of creating high-energy pulses, allowing for the creation of hard, durable, and high-density etch/asher layers to be etched. It also has a control tool for deep-etch processes which allows for the accurate control of deep etching depths and uniform etching processes across the entire substrate. The unit also offers a range of process time/temperature automation options, allowing users to customize their etch/asher process to their specific needs. GASONICS Aura 1000 offers a range of etch/asher capabilities, making it a valuable etch/asher asset for production, development, and research environments. Its range of processes, control options, and gas manipulation features provide users with a versatile and powerful etch/asher model, capable of producing consistent and reliable results across a wide range of substrates.