Used GASONICS / NOVELLUS Aura 1000 #293622463 for sale
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GASONICS / NOVELLUS Aura 1000 is a high precision etcher or asher. It is a tool used in the fabrication of ultra-small electronic components and is widely used in semiconductor and electronics manufacturing. GASONICS Aura 1000 combines advanced etching technology with a comprehensive range of features, creating a powerful, reliable and economical tool for the fabrication of leading-edge nanotech devices. NOVELLUS Aura 1000 utilises high-end ElectroChemical Processing (ECP) to deliver high levels of precision etching and fewer process defects than conventional etching methods. ECP is a reliable and extremely accurate technique, using accelerated, high-energy ions to achieve finely planned etching. Aura 1000 is compatible with a wide range of materials, including metals, dielectrics, plastics and alloys. This makes it ideal for the production of next-generation semiconductor devices and other components. GASONICS / NOVELLUS Aura 1000 features a range of features designed to ensure optimal process control and etch uniformity, as well as saving time and money. These include high position accuracy, a range of 9 etching programs, a high-speed 10X scan to ensure accurate etching of small features, integrated fault detection, and an adjustable pre-etch cycle for faster etching on non-metal materials. This ensures that etch uniformity, etch selectivity, and position accuracy are all optimized, leading to higher yields and fewer process defects. GASONICS Aura 1000 also features an automated system for tool maintenance, which allows operators to easily plan and monitor preventive operations, reduce downtime and extend the life of tools. Additionally, GASONICS cutting-edge diagnostics dashboard software allows operators to quickly and continually monitor the status of tools, assess trends and optimize process parameters. Overall, NOVELLUS Aura 1000 is a powerful and reliable precision etcher or asher. It combines high-precision ECP etching technology with a comprehensive range of advanced features, making it well-suited for the production of next-generation nanotechnology devices. Coupled with its automated maintenance and diagnostics abilities, Aura 1000 affords a cost-effective solution to high-precision etching or ashing operations.
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