Used GASONICS / NOVELLUS Aura 1000 #293690392 for sale
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ID: 293690392
Ashers
Wiring schematics
O-Rings
Spare parts:
Serial cable
Optical sensor
Various screws
Brackets
(15) Halogen lamps
(3) Glass discs
A06-010-01/H Plasma tube
HITACHI 2M121A Magnetron
MKS 152E-P0 Valve controller
(2) Notebooks with process notes
(2) Binders with printed manuals
Manual:
(3) Services
Training
Operator
Maintenance.
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