Used GASONICS / NOVELLUS Aura 1000 #9171308 for sale

GASONICS / NOVELLUS Aura 1000 is a Goliath class of etch systems designed to meet the cutting-edge needs of lithographic processes. GASONICS features a single, trench-like chamber that contains precision computer-controlled RF heating elements to enable excellent accuracy and process uniformity. The Etch chamber on GASONICS Aura 1000 is constructed from silicon- and quartz-based materials coated with a high-performance ceramic, which helps to protect the chamber from corrosion and particles. Inside, the chamber is equipped with an integrated rotator which allows for a uniform heating process for the entire substrate. NOVELLUS Aura 1000 also includes an advanced mechanical vacuum control equipment to establish a vacuum environment in the chamber. This, combined with the additional RF heating elements, enables a uniform substrate profile without affecting the structures of the substrate materials. Aura 1000 is also equipped with an advanced system for monitoring the etching process known as Smart Process Control. This unit serves to measure and monitor the etching environment in the chamber and can accurately measure the aspects of the process such as temperature, pressure, and RF frequency level. The machine also is programmed to allow for adjustments to be made according to specific requirements of process applications. GASONICS / NOVELLUS Aura 1000 also features a high-precision materials delivery tool that allows for the precise delivery of materials directly into the etching chamber. It comes equipped as standard with a Precision Transfer Chamber, which ensures clean and high-precision material delivery and high substrate throughput. As an extra precaution, the machine also includes a high-pressure return asset which prevents any airborne particle from entering its chamber. GASONICS Aura 1000 is capable of processing a variety of materials, from silicon and quartz to metals and ceramics. It's programmable to adjust parameters to allow for optimal etching of various materials, including the most challenging structures such as microvias, trenches, and mask layers. NOVELLUS Aura 1000 is an invaluable tool for any etching and asher facility and is capable of greatly increasing the efficiency and accuracy of processes. Whether processing sensitive structures or hard alloy materials, this machine is a powerful and reliable choice for etching.