Used GASONICS / NOVELLUS Aura 1000 #9186489 for sale

GASONICS / NOVELLUS Aura 1000 is a next-generation etch equipment designed for high-volume production of unique, high-resolution etch features on silicon wafers. It features an advanced direct-drive platform that enables more precise feature etching and a simplified process infrastructure. It offers greater control over the etching parameters, faster cycle times, and superior film quality, resulting in fewer in-process defects. GASONICS Aura 1000 is equipped with the latest generation of etch hardware, based on GASONICS field-proven CVD architecture, and is configurable with a variety of etch modules. The etch plate is powered by a Micro-Electro-Mechanical System (MEMS) array of etch generators which enables high-accuracy patterning of narrow trenches and other advanced etch features. Additionally, the platform supports a shift register architecture to reduce the overhead time associated with moving the wafer between etch steps. NOVELLUS Aura 1000 maintains reliable etch performance by applying an advanced recipe optimization algorithm, which automatically adjusts the etch parameters to match the material properties of the wafer, ensuring consistent etch performance. This feature is especially useful when working with unique films or multilayer structures. Aura 1000 is also equipped with several safety features, including an enclosed chamber, safety shut-off switch, and the latest in interlock technology. It is also designed to be resistant to electrical surges and other damaging power issues. In addition, the unit is equipped with an exhaust filter to reduce the amount of particles present in the process area. GASONICS / NOVELLUS Aura 1000 can process up to eight wafers in parallel, and it has been designed to take advantage of the latest in high-speed communication protocols, making it an ideal choice for systems requiring high throughput and repeatability. It is also compatible with industry-standard tools and infrastructure, including automation systems. Overall, GASONICS Aura 1000 is an industry-leading etch machine that features high-accuracy etching, fast cycle times, and a simplified process infrastructure. With its reliable performance and safety features, NOVELLUS Aura 1000 is an ideal choice for semiconductor etching applications.