Used GASONICS / NOVELLUS Aura 1000 #9210307 for sale

GASONICS / NOVELLUS Aura 1000 is a sophisticated etcher / asher that is used in semiconductor production and other intricate processes that require precise, repeatable control. It is a high-throughput, advanced ashing equipment for processing of aluminum and other materials on 200mm and 300mm wafers. It is capable of handling a variety of substrates and provides superior performance in terms of throughput and resist residue reduction. GASONICS Aura 1000 features an advanced, patented etch technology that accurately and precisely etches aluminum and other materials. It has a scalable, high-throughput, uniform etch process that is capable of handling a broad range of wafer sizes. A combination of asymmetric and symmetric coatings allow substrates to be etched without undercutting and within tight process tolerances. The two-chamber system also features individual chucking and ashing capabilities, allowing processes to be fine-tuned and controlled as needed. NOVELLUS Aura 1000 also includes a modularized design for quick and easy installation and maintenance. Aura 1000 supports a wide range of unit curves, power levels, and chamber configurations to meet the needs of various processes. It boasts a 100x lower throughput rate (cost and time savings) when compared to older systems and can effectively reduce critical dimension variation by up to 50%. The high-throughput, uniform etch process offers improved control over wafer thickness uniformity and enables repeatable, production-ready results. The machine also has a wide, intuitive user interface for programming, monitoring and advancing process flows. GASONICS / NOVELLUS Aura 1000 employs advanced, proprietary handling technology and advanced climate control to ensure consistent, superior results. It offers superior repeatability and uniformity in both etching and resist stripping processes, ensuring optimized processes. The advanced wafer handling technology offers the flexibility to easily switch between etching and ashing without the need for additional equipment. The temperature-controlled chambers also ensure improved N2 purity and higher levels of process repeatability. In addition, GASONICS Aura 1000 features advanced self-diagnostic capabilities and detailed reports to ensure optimal performance of the tool. It utilizes advanced sensors and tight control of the etch environment to ensure that parameters are met. The advanced automation options also allow the user to make adjustments on the fly, ensuring accurate and repeatable results. Overall, NOVELLUS Aura 1000 is a powerful and high-efficiency etcher / asher that is capable of handling a wide range of materials. It is a cost-effective solution that provides repeatable and accurate results for a variety of processes. It is also easy to install and maintain, ensuring reliable and long-term performance.