Used GASONICS / NOVELLUS Aura 1000 #9242400 for sale

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ID: 9242400
Asher Throttle valve controller & MFCs included Does not include pump.
GASONICS / NOVELLUS Aura 1000 is a high-tech etcher/asher with a wide range of applications. It has an intuitive user interface and is designed to work with minimal operator training, allowing it to perform complex etching and cleaning tasks in an easy and efficient manner. The equipment features a low-voltage cathode-ray tube plasma source, allowing it to etch at varying temperatures and depths, while maintaining uniformity.The display screen is a full-colour LCD and is linked directly to the system's onboard computer, allowing the user to easily control the etching parameters. GASONICS Aura 1000 also has an integrated bonder/debonder unit, allowing for quick and accurate wafer attachment and removal. This device is capable of rapid batch processing, meaning it can etch, wash and clean hundreds of wafers in one batch, greatly increasing throughput. The Plasma-Guard machine provides a failsafe secondary cleaning stage to guarantee better process control. NOVELLUS Aura 1000 has a two-step physical etching process: reactive ion etching and plasma chemical etching. This allows the user to achieve a precise etch depth, as well as precise process times. The etching process also allows for excellent control of layer thinning, important when creating multi-layer photoresist or copper structures. The unit is built for a long service life and requires minimal maintenance. The tool is accessed through the user interface, complete with troubleshooting and diagnostic functions that enable quick and accuracies of work. Overall, Aura 1000 is an intuitive, high-end etching asset that is built for efficiency, accuracy and convenience. Its wide range of functionality and level of automation make it a great choice for etching or cleaning applications, providing outstanding performance for a multitude of wafer and component processes.
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