Used GASONICS / NOVELLUS Aura 1000 #9280985 for sale

GASONICS / NOVELLUS Aura 1000 is an etcher/asher designed to offer superior process flexibility as well as superior equipment performance. The system boasts a production capacity of 6" wafers per hour (wph) and is capable of etching wafers with sizes ranging from 4" to 6". The tool offers an invaluable option for fabricators needing to process larger wafers. It can accommodate up to sixteen (16) process chambers providing customers with a range of process choices from different recipes. GASONICS Aura 1000 is a high-capacity, high-performance etching/increasing tool for a wide range of applications. It combines advanced technology with user-friendly ergonomics for simplified operation and maintenance. The tool also offers superior process flexibility thanks to its three recipes integrated within each process chamber. It is also equipped with innovative features such as process intelligence, automated diagnostics and auto-calibration capabilities. The unit has the capability to etch various semiconductor materials, including silicon, germanium and various other III-V compounds. NOVELLUS Aura 1000 has the capability to deliver optimal results and, at the same time, reduce cost of ownership. It has been designed with an advanced, production-oriented control machine to ensure an efficient, reliable and cost-effective etching process. The tool employs a multi-effective, multi-mode, multi-lane etching platform, along with easy-to-use recipe programming. The entire asset is also designed to be continuously supervising the process and making adjustments based on feedback from the sensor model. This ensures that the etching process is consistent and in tune with the customer specification, providing excellent process performance and turnaround time. In addition, Aura 1000 offers full factory monitoring and process control, with the ability to process multiple wafers simultaneously. The tool is compliant with ECD and other relevant industry standards, providing an ideal solution for efficient, high-precision etching processes. The equipment is designed with an integral particle handling system, ensuring that the user environment is not contaminated and the device is kept clean. Overall, GASONICS / NOVELLUS Aura 1000 is a powerful, user-friendly and affordable etching/asher engineered to provide fabricators with a cost-effective, production-oriented tool for a wide range of semiconductor etching applications.