Used GASONICS / NOVELLUS Aura 1000 #9390033 for sale

GASONICS / NOVELLUS Aura 1000 is a high-end etcher/asher equipment used for advanced semiconductor applications such as deep-trench contact patterning and flash memory. The system employs proprietary advanced etch technologies, including copper and pre-metal dielectric wet etching, to produce high yields with excellent electrical performance. GASONICS Aura 1000 features three configurable process modules with a wide selection of advanced etch chemistries. The unit's processing head can be tailored to each material and feature's specific etch requirements. It utilizes powerful automation software to enable tunable etch parameters and run error-free processes. The machine comes equipped with a high-end rotary chuck to accommodate various wafer sizes, with the ability to automatically switch between the different substrates. It is also capable of handling both planar and 3D structures, such as copper pillar and TSV stacks. One of NOVELLUS Aura 1000's major advantages is its ability to process large amounts of substrates in a single run. Compared to other etching systems, Aura 1000 can increase wafer throughput and save time by handling up to 24 wafers simultaneously. In addition to its processing capabilities, GASONICS / NOVELLUS Aura 1000 also boasts advanced monitoring systems to ensure consistent performance and reliable results. The tool incorporates advanced level metrology tools to continuously measure etch rates and adjust asset parameters for optimum process control. Overall, GASONICS Aura 1000 provides an ideal platform for etching and ashing advanced features and structures. By offering a full suite of etching capabilities and superior process control, NOVELLUS Aura 1000 can help improve product productivity and yield, while delivering reliable and cost-effective process solutions.