Used GASONICS / NOVELLUS Aura 1000 #9392786 for sale

GASONICS / NOVELLUS Aura 1000 is an etcher/asher that offers high productivity, low maintenance, medium to high throughput, and consistent results. The core components of the machine include an etching chamber with a high-power RF generator and a low pressure environment as well as an ashing chamber with high-pressure plasma and microwave generators. The machine is capable of etching and ashing various materials such as InP, GaAs, Si, and SiGe. The major components of the chamber are the process chamber, endbell, RF source, RF matching unit, IGBT Match, vacuum equipment, toploader, bellows, loadlock, and exhaust system. Different components of the RF source include RF generator, RF matching unit, IGBT Match, RF torch, and RF blocker. The microwave source consists of a magnetron for ashing process, and a high-power magnetron for etching process. GASONICS Aura 1000 is a cost effective etching/ashing unit that can handle 200-300 wafers up to a diameter of 8 inches. It is designed for medium to high throughput and offers a wide range of etching and ashing processes. For example, it is capable of Deep Reactive Ion Etching (DRIE), Plasma Immersion Ion Etching (PIIE), and Plasma assisted oxidation ashing. The process chamber is equipped with a set of nanoparticles cleaning facility to ensure particle-free substrates. It also facilitates repeatable and reliable temperature control to ensure optimal process dynamics. This machine is also equipped with the OptiSelect software which helps the user to select the best etch and ashing processes to obtain the desired performance and results. To ensure optimal process results, NOVELLUS Aura 1000 supports both conventional process monitoring and automatic process optimization. This includes monitoring parameters such as etching selectivity, etch rate, feature size control, gap distance, and mask uniformity. In addition, the machine is able to predict and detect process drift, thus preventing significant process variation from occurring. Overall, Aura 1000 is an ideal etcher/asher for medium to high throughput applications. It is highly efficient, easy to use, and provides reliable, repeatable results. The machine is also equipped with various safety features such as a spark detection machine to ensure a safe process environment.