Used GASONICS / NOVELLUS Aura 1000 #9398806 for sale

GASONICS / NOVELLUS Aura 1000 is an advanced etcher/asher designed to enable advanced chip-scale feature designs. This equipment is capable of performing complex and intricate etching of dielectric and conductor layers on substrates ranging from 2 to 10 inches in size. It is also capable of processing all kinds of materials including polyimide, polysilicon and metals. GASONICS Aura 1000 delivers superior precision and accuracy in etching, with a minimum feature size of 0.5 µm, and a superior finish. The equipment uses an end-point detection system to control the etch rate and endpoint, and the fabless multi-doping technology allows accurate doping measurements within the process. The tool also features a digital closed-loop control system and synthetic jet cleaning processes. The Auras 1000 offers an array of benefits that include lower operating costs and more efficient processes. Its innovative software platform is designed to enable faster time-to-market with an easy-to-use interface and adjustable tools. The equipment also combines procedural simplicity with increased production throughput. This ensures error-free processing due to the elimination of manual parameter adjustments. NOVELLUS Aura 1000 is highly reliable and provides a cleanroom compatible environment for editing operations and confined spaces. In addition, this etcher/asher requires the implementation of safety measures to ensure the safety of its users and operators from harm. Aura 1000's design and construction also protects the equipment and its components from long-term damage due to wear and tear. The etcher/asher is also environmentally friendly, producing fewer emissions and noise compared to traditional equipment of its type. Moreover, its design is also energy efficient, consuming approximately 15% less energy than similar etching systems. In conclusion, GASONICS / NOVELLUS Aura 1000 is an advanced etcher/asher designed to enable complex and precision etching of dielectric and metallic layers. Its combination of precision, high throughput, ease of use and safety features make it an ideal choice for those looking for an easy-to-use and efficient etcher/asher.