Used GASONICS / NOVELLUS Aura 2000 #293654418 for sale
URL successfully copied!
Tap to zoom
GASONICS / NOVELLUS Aura 2000 is a High Performance Plasma Etcher / Asher which is designed for use in a wide variety of semiconductor processing applications. This plasma etcher / asher utilizes Advanced Plasma Technology (APT) to provide etching and ashing properties on advanced metals, including aluminum, copper and titanium. GASONICS Aura 2000 is engineered for high-end process performance and reliability, and is the industry's gold standard for etching and ashing applications. NOVELLUS Aura 2000 utilizes a unique proprietary Low Pressure Plasma Source (LPPS) to achieve its advanced etching and ashing capabilities. With this technology, the etching speed is controlled by both the pressure and the chamber/source temperature. The pressure and temperature can be modified to meet the customer's etch and ash requirements. The LPPS also enables high ion density, which improves the etching uniformity and selectivity. In addition, Aura 2000 features Proprietary Internal RF System (PIRFS) which allows for precise and efficient flexibility in etch rate and power levels. The PIRFS also makes it possible to monitor the process in real-time as well as to fine-tune the process by controlling individual etch/ash zones throughout the substrate. This allows for more efficient operation and more consistent performance. GASONICS / NOVELLUS Aura 2000 is capable of achieving very fine line pattern depth and uniformity making it ideal for patterning challenging materials. The high etch rates, uniformity and selectivity give users the flexibility to choose the optimal configuration to meet their etching needs. GASONICS Aura 2000 also features safety features such as interlocks and enhanced diagnostics. The diagnostics feature helps ensure that the system is operating properly while the interlocks help protect against operating in hazardous conditions. NOVELLUS Aura 2000 is a powerful etcher / asher that provides interchangeability with other process tools, making it easy to integrate into any semiconductor environment. With its advanced features and technologies, this etcher / asher is well-suited for a wide range of etching and ashing needs with respect to metals, nitrides and oxides.
There are no reviews yet