Used GASONICS / NOVELLUS Aura 2000 #293761940 for sale

GASONICS / NOVELLUS Aura 2000 is an etcher/asher used in the fabrication of integrated circuits and other microelectronic devices. It is suitable for processing most routine etching and ashing applications used in production and engineering. The equipment is designed to provide a fast, reliable and repeatable process, while maintaining a superior level of flexibility and precision. GASONICS Aura 2000 utilizes a patented three-stage process designed to optimize substrate cleaning and material etching. The first stage of the process is an etching stage. During this stage, a necessary etching chemistry and passivation layer is applied to the substrate. The etching chemistry and passivation layer is designed to break down any organic or metallic contaminants that may exist on the substrate and is designed to leave a clean substrate surface. The second stage is the ashing stage. During this stage, oxygen is introduced into the chamber to begin the ashing process. The oxygen reacts with the surface contaminants and oxidizes them, changing them from solid to gaseous form. Additionally, the ashing process helps to remove any remaining residue that may have been left behind from the etch process. The final stage of the process is the cleaning stage. During this stage, the chamber is flooded with nitrogen gas, which helps to flush out any remaining process residue. The nitrogen gas is also used to filter out impurities from the chamber atmosphere, thus ensuring a clean and uniform atmosphere inside the chamber. NOVELLUS Aura 2000 is equipped with a full suite of process monitoring and automation features, which ensure precise process control and repeatability. The system is also equipped with an integrated controller, which allows for easy unit programming and process optimization. The machine also has an intuitive graphical user interface, which allows the user to easily and quickly set-up and control the tool. Aura 2000 is an ideal solution for a variety of etching and ashing applications. The asset helps ensure fast, reliable and repeatable process performance, while providing a superior level of flexibility and precision. With its integrated automation solutions, GASONICS / NOVELLUS Aura 2000 is a cost-effective and efficient solution for many etching and ashing processes.