Used GASONICS / NOVELLUS Aura 2000 #9077802 for sale

GASONICS / NOVELLUS Aura 2000 is a high-end wafer etcher/asher used in semiconductor fabrication. It is equipped with two process chambers, capable of controlling the deposition and etch rates of various materials. It comes with a host of features, such as support for low-k dielectrics, a quartz viewport for chamber monitoring, multi-chamber substrate loading and biasing capability, as well as options for ion and plasma source sputtering. GASONICS Aura 2000 can etch through a wide variety of materials using various processes such as reactive ion etching, deep reactive ion etching, organic etching, and high aspect ratio etching. It also has a built-in optical monitoring equipment, allowing for real-time monitoring of the etching process. The device has an advanced process control interface. It can be programmed to run standard processes or customized processes to suit different layers, devices and structures. It is capable of running multiple processes in sequence, driving down cycle time. It comes pre-configured with a range of recipes designed to optimize process conditions based on the etches desired. NOVELLUS Aura 2000 also features an automated valve checkpoint, which helps to ensure consistency in etch processes providing repeatability and accuracy. The device is equipped with a balance of reactive gas and inert gas delivery systems. It is designed to ensure that cleaner processes are possible over time, balancing the need for process speed and cleanliness. It also features a variety of sensors and monitoring equipment to ensure the safety of operations within the chambers and around the wafers, helping to avoid any mishaps. The machine is built with a variety of diagnostic and monitoring subsystems, allowing advanced process optimization. It includes a degas module for removal of contaminants from the processing chamber, and an auto-focus system for automatic wafer etching focus control. The unit is multi-chamber compatible, making it easy to integrate with other tools in the production line. Overall, Aura 2000 is a state-of-the-art etch and asher machine, specifically designed to simplify processes and increase throughput in the semiconductor fabrication process. It offers high accuracy and high yield wafer etching, along with various control features and multiple options for etch gas and other processes.