Used GASONICS / NOVELLUS Aura 2000 #9078051 for sale

GASONICS / NOVELLUS Aura 2000 is an etcher/asher equipment designed for use in the semiconductor industry. It is capable of etching advanced patterning down into single-digit microns, making it one of the most precise systems available. GASONICS Aura 2000 uses electron cyclotron resonance (ECR) in an ultra-high vacuum chamber to achieve very accurate etching results. The system has two different ECR etching capabilities- with either a 2.45 GHz or 2450 MHz frequency depending on the desired etching accuracy. NOVELLUS Aura 2000 also has a low-frequency plasma cleaning feature, which is used to reduce the damage points on the surface of the substrate and improve the etching results. The unit has an intuitive control interface, with a graphical user interface (GUI) that makes controlling the etching process easy. Aura 2000 has an automated recipe machine that allows for multiple recipes to be set up for multiple substrates. It also supports remote access capabilities, either through an Ethernet connection or a fiber-optic link. In addition, the tool is capable of standard industry interfaces, such as SCSI-2 and RS-232. The precision of the mechanical components of GASONICS / NOVELLUS Aura 2000 make it suitable for etching advanced patterns and features. The linear stages are able to move the substrate accurately in three axes and the motorized mass flow and vacuum systems are capable of operating with high stability and accuracy. The asset also has a very precise aiming model which helps to improve the accuracy of the etching process. The advanced process recipes for GASONICS Aura 2000 allow users to optimize the etching process depending on the requirements of the substrate. This gives users the flexibility to etch different types of materials without any compromised results. The equipment also has an auto-tune function, which helps to optimize the etching parameters for different substrates. Overall, NOVELLUS Aura 2000 is an advanced etcher/asher system that is capable of achieving highly precise etching results. The unit has a high-precision aiming machine and advanced process recipes, as well as intuitive control interface and remote access capabilities. With its advanced features and capabilities, it is an ideal choice for etching advanced features in semiconductor industry applications.