Used GASONICS / NOVELLUS Aura 2000 #9233409 for sale
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ID: 9233409
Wafer Size: 8"
Asher, 8"
Model no: 99-0339
Install type: Tabletop
Machine run time: 9,646 Hours
Filament run time: 16,005 Hours
Wafer passes: 7132
Includes:
AURA 2000LL PR Strip
BOC EDWARDS NGH425100 Main chamber pump
BOC EDWARDS iQDP40 LL Pump
Microwave generator:
NATIONAL ELECTRONICS A95-045-01-E
Position: Main chamber
Gas line / Gas / MFC Make / MFC Model
1 / O2 / HONEYWELL / MIDAS-E-LEL
2 / N2H2 / HONEYWELL / MIDAS-E-LEL.
GASONICS / NOVELLUS Aura 2000 is a high-precision etcher / asher designed specifically for the advanced needs of the semiconductor industry. This powerful etcher utilizes a unique combination of etch and ash techniques to produce circuit boards and integrated circuits that meet the highest standards of quality and reliability. GASONICS Aura 2000 is equipped with a wide variety of high-end features to ensure optimum etch/ash performance and results. Its ultrahigh resolution optics equipment provides up to 25,000 lines per inch resolution, which enables it to achieve the highest levels of accuracy in etching and ashing processes. The system also utilizes a quartz and ionized gas chamber for precise etching of complex circuit patterns as well as a high-pressure etch chamber for cleaning and etching metals. NOVELLUS Aura 2000 also features a variety of advanced material handling capabilities. Its high-speed wafer handling unit allows for quick and efficient loading and unloading of devices while its advanced robot-based wafer sorter delivers precision movement and placement. Additionally, its conveyor-based transport machine enables accurate delivery and handling of integrated circuits with up to 1,000 I/O ports. Finally, Aura 2000 is designed with a host of safety features to ensure optimum operating conditions. Its dual controller modules enable multiple process runs to be monitored and supervised and a wide variety of sensors provide data on the environmental conditions of the tool. This asset is also built with an advanced cooling model for temperature control and efficient operation. GASONICS / NOVELLUS Aura 2000 equipment is an incredibly powerful etching/ashing device that is designed to meet the rigorous requirements of the semiconductor industry. Its advanced optics system and material handling capabilities enable it to produce high quality and reliable results and its safety features ensure that the unit operates safely and securely.
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