Used GASONICS / NOVELLUS Aura 2000 #9247833 for sale

GASONICS / NOVELLUS Aura 2000 is a high-performance chemical etcher/asher that provides state-of-the-art etching and ash processing capabilities for advanced research and development. Specifically designed for scaled-down device fabrication processes, it has the capability to process substrates from 0.5 to 6 inches in diameter. GASONICS Aura 2000 provides precise control over the etching and ashing process, allowing users to precisely adjust power and gas composition to achieve the desired results. This flexibility is backed by advanced process control technology, allowing users to monitor the process parameters during etching and ashing. NOVELLUS Aura 2000's advanced design minimizes the time needed for etching and ashing. High precision nozzle assemblies, advanced process control technology, fast firing times, and the ability to support larger-diameter wafers make this an ideal etcher/asher for many applications. Aura 2000 is also highly repeatable, so users can confidently reproduce the same results in multiple passes. GASONICS / NOVELLUS Aura 2000 also features advanced load-lock technology, which ensures wafer protection from contamination. It provides optical photo-eye sensing and process automation, and has an adjustable load-lock chamber to accommodate different sizes and shapes of wafer substrates. GASONICS Aura 2000 is designed for efficient operation and ease-of-use. It has an intuitive graphical user interface (GUI) and graphics process monitoring, allowing users to quickly adjust etching and ashing parameters to achieve the desired results. Its low weight is an added benefit for those who may need to move the etcher/asher from one location to another. Overall, NOVELLUS Aura 2000 is a high-performance etcher/asher which provides state-of-the-art etching and ash processing capabilities with advanced process control technology. It offers fast firing times, repeatability, and the ability to accommodate large substrates, making it a great choice for a variety of advanced research and development applications.