Used GASONICS / NOVELLUS Aura 2000 #9313666 for sale

GASONICS / NOVELLUS Aura 2000 is an etcher/assembler that provides high-precision, high-throughput ashing for the semiconductor, MEMS, and nanotechnology industries. GASONICS Aura 2000 offers excellent etching performance in the most challenging situations, with a wide processing window allowing for production of the world's most advanced structures. This state-of-the-art equipment is designed to offer the highest level of flexibility and cost-effectiveness for stretching, etching, and stripping of wafers and packaged devices. NOVELLUS Aura 2000 is equipped with a wide range of features to ensure precision and repeatability during etching applications. It offers a wide range of standard gas mixtures including oxygen, HBr, CHF3, from which etching times and etch rates can be calibrated. It has a simple command interface that allows users to easily change equipment parameters and select the appropriate time, pressure, and temperature during the etching process. It also has warm-up protection capability to protect the process equipment from thermal decay while providing improved etch rates and quality. Aura 2000 is built with patented gas injection systems for virtually no-breakdown ashing - allowing for very fast throughput with minimal gas consumption. It is equipped with two ashers, a low-temperature asher and a high-temperature asher, for maximum flexibility. Low temperatures enable high precision and repeatability during etching of delicate structures, while high temperatures enable fast throughput with high etch rates. A small sample size of silicone is included with the Aura allowing users to start etching immediately. GASONICS / NOVELLUS Aura 2000 is designed to meet the highest industry safety standards and has a certified enclosure that ensures safety from hazardous gas flow. The system also has automatic speed control and gas isolation to effectively control the etching operation. In addition, the use of an inert atmosphere for wafer protection minimizes defect formation while maximizing product yields. All components are housed in a single enclosure to ensure ease of maintenance and superior reliability. GASONICS Aura 2000 offers users flexibility, convenience, reliability and cost-effectiveness-making it one of the top etchers/assemblers available on the market. Its unique features, robust construction and sophisticated design make it a great choice for any semiconductor, MEMS and nanotechnology application.