Used GASONICS / NOVELLUS Aura 2000LL #293605214 for sale

GASONICS / NOVELLUS Aura 2000 is an etcher/asher ideal for etching and cleaning semiconductor wafers. It is fully automated, with manual overrides for dielectric work. An LCD touch screen is used for all setup, programming, and process control. The unit has two fully independent etchers for simultaneous processes, and two process chambers for rapid parallel processing. GASONICS Aura 2000 features a reactor chamber designed to accommodate up to four wafers of various sizes up to 200mm, as well as samples with special geometries. It is equipped with a powerful RF inductive generator that is driven by an adjustable frequency digital power supply, allowing for precise control of the plasma etching process. The inductor is also capable of driving either a single or dual frequency coil that can be tuned according to process needs. NOVELLUS Aura 2000 also features a high-precision ladle or boat delivery equipment known as the Multifunctional RF-Ready Beam Creel. This advanced system is capable of precise delivery of etchant, chemicals and other reactants. The creel is equipped with RF probes for precise positioning of wafers and precise delivery of etchant. Aura 2000 also has an integrated multi-gas delivery unit for precise flow control and rapid analyses. This machine can be fully automated for single or multiple gas deliveries, allowing for precise control and multimode recipe flexibility. GASONICS / NOVELLUS Aura 2000 is fully compatible with a range of industry standard plasma etching processes, including In-sulator-based Deposition, Sputter Deposition, Reactive Ion Etching, Out-gas Removal, and Contamination Etching. Its advanced process chamber design ensures a precise and uniform chamber temperature at all times, making it ideal for a wide range of etching and cleaning processes. Finally, GASONICS Aura 2000 has a number of safety features, such as a built-in digital control tool and a security lock, ensuring that only authorized personnel can access the unit. This asset also has four levels of emergency stop capability, allowing operators to respond quickly and safely in the event of an emergency. The unit also includes an advanced diagnostics model that can generate detailed reports and alarms in case of emergency or abnormal operation.