Used GASONICS / NOVELLUS Aura 2000LL #293658974 for sale

GASONICS / NOVELLUS Aura 2000LL is an etcher / asher which is designed to process a wide range of materials, including silicon, metals, compound semiconductor materials, and photo resists. The equipment has advanced advanced vapor phase etching capabilities, enabling high-performance processing of materials for microelectronic, biomedical, and mechanical applications. GASONICS Aura 2000LL etcher / asher utilizes low-pressure, RF-frequency gas to precisely etch both conductive and non-conductive materials, while maintaining excellent uniformity and throughput. It also utilizes advanced diagnostic and process control systems to ensure process repeatability and maintain accuracy throughout the process. The machine is tailored to the needs of both professional and amateur users, with automated and manual tuning capabilities providing simple and easy operation for both novice and experienced users. The machine consists of two modules, the process chamber and the etching gas delivery system. The main chamber is capable of accepting wafers up to 5 inches in diameter and has a fully-recessed diffusion plate to maximize etching uniformity across the entire surface. The gas delivery unit is equipped with a digital pressure control feature, allowing for precise etching through gas flow adjustments. The integrated control systems allow for full control and visualizations of all etching parameters, allowing for easier set-ups and simplifying the process of achieving the best etching result. This is combined with a built-in single-point detection machine, which monitors the etch process continuously and produces a readout indicating the progress of the etching. NOVELLUS AURA 2000 LL etcher / asher is a highly precise, reliable, and productive tool suitable for a wide range of etching applications. Its superior process control features provide an uncomplicated and accurate method of achieving consistent results, while its intuitive user interfaces make it easy to use. The machine is suitable for any application that requires high-precision etching and its low-maintenance and affordable design makes it an ideal choice for any size of operation.