Used GASONICS / NOVELLUS Aura 2000LL #9113641 for sale

GASONICS / NOVELLUS Aura 2000LL is an etcher/asher equipment for advanced manufacturing that delivers precision production and high throughput. It is designed to provide robust etching and ashing with reliable High Density Plasma (HDP) processes for semiconductor wafer fabrication. This state-of-the-art system is fully automated with process logs, alarms, and a user-friendly touchscreen for simplified operation. GASONICS Aura 2000LL features advanced HDP technologies for greater precision. A variable pressure unit helps maximize the energetic potential of treatment processes while maintaining a consistent plasma environment. Additionally, the machine utilizes an improved clean processing method for fewer defects and higher yields. The tool is equipped with a comprehensive detection and defect-free function to enable better product quality and process stability. Its advanced real-time fault checking ensures smooth operation and rapid alarm response. Additionally, recipes are automatically optimized and adjusted as process parameters change, while an integrated vision asset utilizes advanced process monitoring and detection. The model also features an advanced mechanical design and advanced coating capabilities for increased accuracy. A sophisticated automated wafer conveying equipment ensures smooth product flow while the low-mass design reduces harsh vibration. Plus, its ability to treat a wide range of wafers and substrates make it a versatile and reliable tool for a variety of tasks. NOVELLUS AURA 2000 LL is a powerful and reliable etcher/asher system for advanced semiconductor manufacturing operations. Its advanced HDP technologies, comprehensive detection and defect-free functions, robust recipe optimization capabilities, and advanced mechanical design offer precise production and high throughput for a variety of tasks.