Used GASONICS / NOVELLUS Aura 2000LL #9145302 for sale

GASONICS / NOVELLUS Aura 2000LL
ID: 9145302
Wafer Size: 8"
Ashers, 8".
The Gibar GASONICS / NOVELLUS Aura 2000LL is an advanced etcher/asher that is designed to accomplish a variety of tasks. The 2000LL offers a high feature count in every department, including its crystal-grow and pattern-generation capabilities, capacitive modulation, and ion-beam acceleration. With its small footprint and high-precision, GASONICS Aura 2000LL can be relied on to deliver uniform, high-performance results every time. The 2000LL features an integrated, VME-compliant microprocessor equipment that rapidly controls the process parameters to provide enhanced performance and system control. The machine also provides a variety of vacuum levels and temperatures. The 2000LL can be used for dry-etching of metals and other materials, wet-etching, wet photoresist removal, etch cleaning, and patterning deposition. The compact design of the 2000LL is relatively user-friendly - providing ergonomic design elements, quick-release ports, and an adjustable-rakeout feature. The removable platen option enables easy transfer of unit components between jobs, while the high-efficiency gas and cartridge supply machine reduce operator time for material loading and cleaning. NOVELLUS AURA 2000 LL also offers a variety of advanced beam monitoring and control features, such as three-axis beam focusing, power control modules for 3D output control, and optical waveform monitoring. In addition, the 2000LL's variable frequency drive output option ensures tight control over the substrate temperature and machine process settings. The Gibar GASONICS / NOVELLUS AURA 2000 LL is an advanced etcher/asher that has been designed to provide precision and consistency across a range of materials. Its integrated microprocessor, adjustable-rakeoutfeature, multi-axis beam focusing, and waveform monitoring capabilities make it an ideal choice for users looking for a sophisticated, easy-to-use, precise, and reliable etching and ashing tool.
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