Used GASONICS / NOVELLUS Aura 2000LL #9227352 for sale

GASONICS / NOVELLUS Aura 2000LL is a state-of-the-art etcher/asher designed to meet the most demanding requirements in the semiconductor industry. This etcher/asher utilizes innovative proprietary gas topologies and distributed processing features to enable users to achieve higher throughput and superior device performance. With its advanced processing capabilities, GASONICS Aura 2000LL provides the highest yield rates and best-in-class quality. NOVELLUS AURA 2000 LL is designed around a high-powered, high-performance etcher/asher head. This provides the mm-level accuracy that is required for today's most precise devices. The advanced etcher and asher chambers are highly efficient, enabling efficient transfers of ions from etcher to asher and back again. This helps to reduce cycle times and provide consistent results over long process runs. Aura 2000LL also offers a range of advanced capabilities that enable users to precisely control the etching and ashering processes. Its advanced process control features allow users to tailor the etch/ashers for specific applications, helping to increase profiling accuracy and improve device yields. The equipment also comes with an advanced Plasma Emission Monitoring (PEM) system that enables users to monitor the etching process in real-time. This helps ensure perfect device performance and yields. AURA 2000 LL utilizes an advanced gas delivery unit to precisely control the etch/ashers. It allows users to customize the gas rates for each etch/ashers, helping to ensure consistent, repeatable results. The advanced software platform helps users to quickly optimize their process settings. GASONICS / NOVELLUS AURA 2000 LL can handle up to 60 wafers per hour and is designed to perform under a variety of process conditions. Overall, GASONICS AURA 2000 LL is an innovative etcher/asher machine designed to meet the needs of today's most demanding semiconductor applications. With its advanced features and capabilities, NOVELLUS Aura 2000LL provides users with unrivaled precision and performance.