Used GASONICS / NOVELLUS Aura 3010 #293598156 for sale

GASONICS / NOVELLUS Aura 3010 is a precision etcher / asher for advanced technology applications. Its design and robust capabilities makes GASONICS Aura 3010 an important tool for use in the field of materials engineering and etch / asher applications. The unit is able to process multiple applications from thin film, etch, and anneal with ease. NOVELLUS Aura 3010 is capable of manipulating precision parts with a step resolution of 10um, and can be configured with up to 8-5 axis stages for precise X-Y, Z, and rotational movement. The unit is also equipped with advanced software and automation controls for precise temperature control and etch profile control. Aura 3010 has a variety of heating sources available, allowing it to process a range of materials. These include structural metals, polymers, and optically accumulated thin films. In addition, the unit can be configured with a variety of masks, both single-level and multi-level, making it suitable for a variety of patterning processes. The design of GASONICS / NOVELLUS Aura 3010 also allows for detailed control over process parameters. This includes control of temperature, pressure, and reaction chamber size, as well as the ability to vary the target material thickness in order to produce a precise etch / asher profile. GASONICS Aura 3010 is also equipped with a wide range of input and output options. These include Ethernet, USB, and integrated software for easy data transfer. In addition, the unit includes a variety of process report functions for review of process parameters and results. Overall, NOVELLUS Aura 3010 is an advanced etch / asher capable of precise processing of thin film and structural materials. Its design supports precise temperature control, masking capability and a wide range of input and output options. All of this makes it an ideal tool for use in many materials engineering applications.