Used GASONICS / NOVELLUS Aura 3010 #293767744 for sale

GASONICS / NOVELLUS Aura 3010 is an etching and ashing equipment capable of delivering precise results for various materials in various forms. Utilizing advanced technology, this plasma asher (also known as a PECVD) is designed to offer excellent performance for the etching, ashing and planarization of various materials such as silicon, quartz, metals, and other materials on an industrial scale. GASONICS Aura 3010 features an automated control system that allows users to customize and set parameters for each etching job. The unit is capable of automatically adjusting to varying substrate temperatures and various etching, ashing and deposition levels. Its high throughput and superior etching results further enhance its usability. The user can easily monitor all processes in real time with the data provided by the control unit. This ensures consistent quality results with each etching job. NOVELLUS Aura 3010 has a blanket processing time of 30 seconds for different substrates, making it a fast-operating machine. This means shorter turn-around times for all etching jobs. It also has a 16-inch wafer etching capacity which makes it suitable for large-scale production. It also offers multiple gas flow options to ensure accurate results for multiple etching materials. The machine is also equipped with an advanced filtration tool to ensure optimal etching processes, and the process gas can be tuned to the material being etched. Aura 3010 is available with additional options that provide customers with the flexibility they need in terms of safety, accuracy and convenience. For instance, there is an optional Exhaust Blower to provide an exhaust outlet to the external environment, thus preventing the accumulation of toxic fumes and exposure. It is also equipped with an oxide-etching option to remove oxide layers from substrates. An RF power generator is available in order to provide higher power and increased capabilities for etching. The unit also includes advanced safety features such as an antivibration mechanism, which ensures safe and controlled operation for personnel and substrates. In all, GASONICS / NOVELLUS Aura 3010 is a highly efficient and reliable asset capable of delivering precise results for advanced material etching, ashing and planarization processes. It offers consistent and cost-effective results for various materials, and provides superior cycle times and throughput. Its multiple gas flow options and advanced safety features make it an ideal choice for complex industrial etching applications.