Used GASONICS / NOVELLUS Aura #293824587 for sale

GASONICS / NOVELLUS Aura is an advanced etch and asher equipment designed for medium to high volume production of integrated circuits. It utilizes a patented dual-lectrode process, combining multiple process technologies, to deliver superior results for a wide range of materials, geometries and feature sizes. GASONICS Aura can process both dielectric and metallic layers with high resolution, requiring minimal process chambers and hardware. It uses an innovative combination of low- and high-density plasma to produce high quality with low defect levels and cost effective results. NOVELLUS Aura offers a full range of features to enable high quality results. These features include superior process control, low-voltage operation for optimal electrical performance, and tool-diagnostics for rapid troubleshooting. The system also has a number of advanced process parameters that enable the user to customize etching and ashing processes to meet the specific needs of their application. This includes etch rates, power densities, screen size, and the ability to utilize multiple process recipes to ensure optimal results. Additionally, the unit comes with built-in optimized program saves and custom macro-programming capabilities, enabling users to customize recipes as needed. Aura is capable of producing precise and precise feature sizes while still being able to process a wide range of materials, geometries and feature sizes. This enables greater flexibility and improved results for a variety of applications. The machine has a user-friendly interface, using touch-screen technology which features process and equipment status displays, automatic recordkeeping, and advanced machine control. This makes setup and operation of the tool much easier and increases its efficiency. GASONICS / NOVELLUS Aura is compatible with many of our other products including post-processing systems, masking systems and metrology tools, reducing the costs associated with owning multiple processing tools. Additionally, the company offers ongoing maintenance, training programs, and support from their experienced customer service and technical teams.