Used GASONICS / NOVELLUS Aura #9238515 for sale

GASONICS / NOVELLUS Aura is an etcher/asher, typically used in the semiconductor production industry. It is capable of processing components with features as small as 0.15 microns (150 nanometers). The machine offers exceptional image quality, reliability, and productivity, making it an ideal choice for producing sophisticated products with precise micro-patterns. The basic unit of GASONICS Aura system is called a PECVD Processor, which can be fitted with up to two chambers. Within each chamber, the components are passed through a gas-filled vacuum vessel, delivering a mixture of reactive gases and a high RF source. The RF source generates the plasma necessary for etching (or ashing, for non-silicon materials) without degrading the substrate and its features. Each chamber is equipped with a moving stage that loads and unloads wafers through the etch processing chamber. NOVELLUS Aura system also features advanced design automation and sophisticated algorithmic control to ensure a reliable and repeatable process. The system has the ability to adjust etch times and gas flows, and ramp power levels, providing a high degree of accuracy and better control of delivered etch rates, uniformity, and other parameters. Aura is designed for high throughput and high yields, making it a great choice for the most demanding production environments. Its etch uniformity across wafers and batches make it ideal for a wide range of applications, including IC device fabrication, MEMS, and advanced semiconductor packaging. GASONICS / NOVELLUS Aura is the ideal solution for those needing precise, repeatable etching for their toughest jobs. Its sophisticated design automation and algorithmic control provide the ultimate in performance and reliability. With GASONICS Aura, customers are assured of receiving quality components with repeatable performance and excellent cost/performance ratio.