Used GASONICS / NOVELLUS / GPT Gamma #9083208 for sale

GASONICS / NOVELLUS / GPT Gamma is an advanced etcher and asher commonly used in electronics and semiconductor industries. It is designed to clean, etch and deposit materials on the surface of a semiconductor wafer. It uses high-pressure oxygen plasma to remove oxides, silicate and hydrocarbons from the wafer. This etcher/asher also features oxygen-reactive gas injection for silver-sulfur etching, and reactive ion etching for high-selectivity etching. GPT Gamma is a fully automated multi-tool equipment that can etch, asher, and clean a wide range of semiconductor wafers ranging from eight to thirty-two inches in diameter. The system can also accommodate a large number of wafer carriers, including expensive 'freewheel' wafer carriers. GASONICS Gamma is designed to minimize particle generation with advanced process monitoring and feedback control technology. It also features a variable process time delay to reduce thermal and mechanical stress on the wafers. The chamber is connected to a powerful gas delivery unit that can preheat and pressurize the chamber. This machine enables the controlled introduction of high velocity reactive gases at precisely controlled levels and temperatures. Gamma is equipped with a state-of-the-art wafer handling tool that features a secured split-level design for the best mechanical protection for the wafers. The asset can also manage a high degree of automation, including heat pre-selection, wafer capture, loading, unloading and pre- and post-process analysis. In addition, NOVELLUS Gamma is compatible with a variety of wafer materials, such as silicon, aluminum nitride and quartz. GASONICS / NOVELLUS / GPT Gamma is one of the most advanced systems on the market, offering outstanding performance and reliability. This model is designed to maximize yields, reduce costs and cycle times, and help ensure overall demand fulfillment. It is certified by multiple standards, and is backed by a world-class team of technical engineers to help ensure customer satisfaction.