Used GASONICS / NOVELLUS L 3200 #9083205 for sale

GASONICS / NOVELLUS L 3200 is a high-tech etcher and asher designed to accurately and reliably etch and ash semiconductor wafers. This equipment is capable of etching and ashing in both p-type and n-type semiconductor materials. It is equipped with a suite of interface tools, sensors, and technologies that allow for precise, high-quality etching and ashing of intricate features on wafers quickly and accurately. GASONICS L 3200, or L 3000 Series, features a highly efficient and reliable electrostatic chuck for wafer clamping. With its electrode array, the system offers up to 13 points of electrical contact, for improved etching and ashing of intricate wafer features. It can accurately etch and ash feature sizes ranging from 0.1μm to 10μm. The unit is equipped with a gas delivery machine for the etching and ashing process. It features efficient pressurization of the process gases as well as advanced software for controlling the flow of the gases during etching and ashing. The tool is invaluable in etching and ashing small devices or components. The etching and ashing process can take place in several different ways in NOVELLUS L 3200. It can utilize chemical vapor deposition (CVD) for etching and ashing layers, including metallic and dielectric. This asset can also utilize plasma etching/ashing to improve the surface quality and accuracy of the feature sizes being etched and ashed on the wafers. L 3200 is a powerful tool for etching and ashing semiconductor wafers quickly, accurately, and reliably. This model's advanced power delivery equipment, electrode array, and gas delivery system all work together to ensure precise etching and ashing of intricate features. The unit offers feature sizes from 0.1μm to 10μm, and the flexibility to etch and ash in both p-type and n-type semiconductor materials. With its diverse capabilities, GASONICS / NOVELLUS L 3200 is an invaluable tool for fabrication plants.