Used GASONICS / NOVELLUS L 3500 #9227632 for sale

GASONICS / NOVELLUS L 3500 is a state-of-the-art etcher/asher for use in the semiconductor fabrication industry. It combines the latest advances in precision lithography, plasma cleaning, and hard-mask etch processes, offering the highest levels of yield and throughput. GASONICS L 3500 has two etch chambers and two plasma systems, enabling it to process up to two wafers simultaneously. It also has a vacuum-sealable cover which allows for the collection of any by-products of the etch process, such as copper etch offstarts. NOVELLUS L3500 incorporates GASONICS patented pulse-plasma technology, which uses a focused, high-density, microsecond-duration plasma pulse to clean the material surface prior to etching. This process removes any impurities or defects before the etch begins, thus ensuring an extremely clean, defect-free end product. As well, L 3500 features a bespoke middle-gas flow system for adjusting the plasma chemistry, allowing it to process a wide range of films. With this system, GASONICS L3500 can etch metals, polymers, dielectrics, and even silicides. NOVELLUS L 3500 is equipped with NOVELLUS patented PFZ software, which allows the user to program and monitor the etching process with accuracy and control. It also features an intuitive graphical user interface, allowing the user to quickly and easily set etching parameters and monitor their progress. L3500 offers excellent end-product quality. Its advanced chamber designs ensure that the etch target is kept free from contamination while it is processed, resulting in exceptionally low defect rates. This allows it to meet the most stringent quality requirements of the semiconductor industry. Furthermore, GASONICS / NOVELLUS L3500 features advanced etch uniformity control, ensuring that all etched material remains within its specified dimensions. In sum, GASONICS / NOVELLUS L 3500 is an advanced etcher/asher designed for the semiconductor fabrication industry. It offers a combination of pulse-plasma cleaning, adjustable plasma chemistry, and a user-friendly PFZ software for end-product control and accuracy. Thanks to its advanced design, GASONICS L 3500 is extremely reliable, yielding high-precision, defect-free end-products.