Used GASONICS / NOVELLUS L 3500 #9235158 for sale

GASONICS / NOVELLUS L 3500 is a high-end etching/ash equipment designed for the chemical mechanical planarization (CMP) processes. It offers high-performance, streamlined operator control and excellent process uniformity in an easy to use system. The unit delivers the highest repeatability and reliability over extended periods of operation and offers the best process control for a wide range of wet and dry etching/ashing applications. GASONICS L 3500 is equipped with a two-axis robotic arm that provides precise, repeatable motion for tooling robot positioning. The arm can be used for aligning tooling on the platform. The machine also utilizes GASONICS microprocessor based, real-time adaptive controls to ensure highest etching/ashing performance. It is combined with a high-performance robotic arm controller that is capable of accurately locating and positioning a single robot or multiple robots at any range of angles and speeds up to 10 shots per second (sps). To ensure uniform process conditions across the wafer surface, the tool utilizes a multi-zone viewport desmearing asset that allows for specific adjustment of process conditions for each zone in the views, enabling process optimization and alignment. Additionally, the model is equipped with an auto-dewetting feature, which automatically maintains the etch/ash uniformity by resetting the platform between wafer etches. This helps reduce errors in each etch, resulting in a consistent etch profile across the wafer. NOVELLUS L3500 is also designed for consistent performance and high process yield. The equipment combines multi-zone control, wafer-level and process-level parameters, and real-time alarm monitoring. Furthermore, the system offers a robotic-integrated vision for tooling that enables high throughput, high precision alignment and repeatability. Overall, NOVELLUS L 3500 is an advanced, reliable, high-performance etcher/asher for CMP processes. It offers high precision and repeatability for high yield etching/ashing. The unit is highly configurable and versatile, and can be adjusted for a wide range of processes and applications. With its advanced features and capabilities, this machine is an ideal choice for the most challenging CMP applications.