Used GASONICS / NOVELLUS L 3510 #293627615 for sale

GASONICS / NOVELLUS L 3510 is an etcher or asher that is designed to enable efficient and precise material removal. It has a fast, repeatable process that offers high throughput with a small, square-shaped non-contact vacuum wafer alignment equipment. The system is capable of producing wafers with virtually zero dents and has the capability of etching precision microstructures with geometric accuracy. GASONICS 3510 is highly reliable and robust, having been designed for long-term use with minimal maintenance. It is constructed with a stainless steel chamber and has a complete wafer alignment and handling unit that ensures accuracy and repeatability. The asher includes three dual-axis stages with a selectable range of 500 mm x 250 mm, allowing for large area etching. It also has an extended chamber wall that improves uniformity and is especially useful for laser applications. Its precision high-end features both speed and accuracy, including an advanced low frequency E-Beam source that enables process control at the substrate level. The etcher uses a deposition module to achieve both uniform deposition and high-throughput operation and features a wafer-to-gas transport machine that enables the etching of a wide range of materials. GASONICS L 3510 is an economical asher that offers an ideal solution for applications in a wide range of fields, including semiconductor and microelectronics. Its high precision and repeatability make it suitable for etching complex shapes and microstructures. In addition, it ensures a consistent and uniform process for each substrate, resulting in maximum yield and low defect rates. Furthermore, it is optimized for low cost of ownership and allows for a quick changeover between wafers, making it cost-effective.