Used GASONICS / NOVELLUS L 3510 #293658983 for sale

GASONICS / NOVELLUS L 3510 is an advanced etcher / asher equipment that is well suited for the production of advanced semiconductor devices. This system features a plasma etching and ashing chamber with independent chemistry control. In addition, it can be automated for improved process control and throughput. The chemical control of this unit is driven by GASONICS patented Plasma enhanced Direct Current (DC) chemistry control machine. This tool ensures precise control of the etching and ashing process, while minimizing variability and improving yields. It also allows the user to select the etch chemistry for a wide range of processes, such as etching aluminium, tin, and copper. GASONICS L 3510 can be configured with various chambers such as a substrate preheat module, and an atomizer and plasma asher. The base unit also features a front door designed for remote plasma operations. This asset also includes automated wafer handling components which include a motorized wafer jam-prevention module and an optional load lock (not included). The model supports a wide range of etch and ashing processes, including aluminum, copper, tin, tungsten, polyimide, ceramics, silicon nitride, and organics, among others. Its high processing speed, up to 200 wafers per hour, is ideal for high-volume production requirements. Additionally, this equipment offers a range of environmental and safety features, such as advanced filtration, and automated fire and overpressure shutdowns, helping to ensure a safe and productive operation. In conclusion, NOVELLUS L3510 etcher / asher is a powerful and reliable system perfect for the production of advanced semiconductor devices. It offers precise chemistry control and high throughput, as well as a range of features designed to keep the process environment safe and repeatable.