Used GASONICS / NOVELLUS L 3510 #9206537 for sale

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ID: 9206537
Wafer Size: 4"-8"
Asher, 4"-8" Process gasses: O2, N2.
GASONICS / NOVELLUS L 3510 etcher/asher is an advanced tool that is used in the production of integrated circuit wafers. It is designed to etch and ash small features, which are needed for the efficient manufacturing of electronic devices. The machine provides precision and high throughput, with an impressive etching rate of 7200 µm/min. The tool is based on a chemical vapour deposition (CVD) equipment, which uses noble gases, such as argon, to deposit chemical layers on the wafer. The chemical layers are then etched or ashed to produce very small features. GASONICS L 3510 etcher/asher is an impressive tool, that offers high degree of versatility, while being easy to operate. It provides excellent repeatability, as it precisely adjusts and controls process parameters during the etching process. A large part of this machine's design is focused on the accurate control and delivery of chemical layers to the workpiece. The tool offers a total of four separate deposition chambers, capable of producing interleaved and original chemical layers. An integral feature of the tool is the wafer conveyance system, which accurately positions the wafer on the transport plate. The plate then precisely moves the wafer to the plasma chamber and etches the deposited layers. A key aspect of NOVELLUS L 3510 etcher/asher is its sensitivity to the material that is being processed. This allows the unit to precisely adjust parameters to ensure optimal etching results. An impressive feature of the machine is its monitoring machine, which gives detailed information about the etching process. L 3510 etcher/asher is an advanced tool designed to provide precision etching and ashing, while maintaining a high throughput. Thanks to its advanced design and operation, the tool provides excellent repeatability and an impressive etching rate. The machine is highly adjustable, capable of etching different material types, and offers detailed monitoring of the etching process. All in all, GASONICS / NOVELLUS L 3510 is an impressive tool, ideal for the efficient production of integrated circuit wafers.
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