Used GASONICS / NOVELLUS L 3510 #9244581 for sale

GASONICS / NOVELLUS L 3510 etcher/asher is a high performance, cost-effective tool designed to meet the etching/ashing needs of advanced technology manufacturers. Developed in partnership with GASONICS Systems and NOVELLUS, the 3510 combines advanced etching and ashing technologies in a single platform - allowing for high throughput and reliable processing of even the most advanced and sophisticated semiconductor devices. The 3510 incorporates an advanced RF etch technology that offers precise, uniform etching. The process is further enhanced by the stepper motor adjustment of the etch bias, allowing for etches of less than 1 nanometer with accuracy and repeatability of 0.5 nanometer. Additionally, the 3510 can process wafers of sizes between 50 to 300 mm, and offers a process capability up to 12.7 inches or 320 millimeters. The 3510 also offers an ashing process that eliminates process residues from the semiconductor surfaces, eliminating the need for hazardous chemical agents. The unit employs thermally enhanced plasma processes for deep, targeted etching and ashing. The process is easily controlled through the use of an intuitive GUI interface, providing for simple set up and run-time method calculations. The unit also features an advanced gas delivery system that provides superior gas control and uniform delivery of noxious chemicals, as well as a chemical injector that enables an automated cycle for inclusion of proprietary additives. Furthermore, the 3510 comes with a general vacuum system, featuring a configurable gas distribution manifold and a reliable pumping system. GASONICS L 3510 etcher/asher is highly automated with user friendly control, making it an ideal tool for etching and ashing operations. The unit is available in both single and three-chamber configurations, and comes with a wide range of options and configurations - making it suitable for a variety of semiconductor fabrication applications. With its innovative design, outstanding performance, and reliability, the 3510 is an ideal tool for advanced semiconductor manufacturing.