Used GASONICS / NOVELLUS L 3510 #9271641 for sale

GASONICS / NOVELLUS L 3510 asher is an advanced plasma-based etcher used in the Advanced IC Manufacturing processes. This advanced etcher is capable of etching a variety of material layers including silicon, metals and dielectrics. It is powered by a FlexEtch Advanced Etcher, which offers precision etching at incredibly high rates by providing an ultra-low-temperature plasma. With GASONICS L 3510 asher, users get more than just etching capability, but also advanced process control, monitoring and analysis tools. NOVELLUS L 3510 asher consists of a robotic substrate nozzle and hot pressurized oxygen plasma source and helps optimize the etching process with its ability to etch each material layer with an ideal etch rate. Its advanced process control helps maintain etch uniformity, eliminates shadowing and offers shift compensation reducing the need for post-process cleaning and drying. Its advanced workstation is equipped with an adaptable controller that can be reconfigured to a range of process parameters and is host to advanced process monitoring and process optimization features. An advanced visualization equipment is also included which allow users to monitor the etching process in situ. L 3510 asher also features an integrated material database, advanced process database and recipe management system which helps facilitate rapid process turn-around. The database is loaded with critical etching metrics and recipes from which users can select and analyze their processing recipes, enabling them to optimize their Device characterization and Pilot production results. Furthermore, the database comes with an onboard database updater that allows the database to be easily upgraded for future processes and applications. GASONICS / NOVELLUS L 3510 asher is designed for safety and offers standard safety features such as an Interlock unit, Remote Emission Control, Off-process monitoring and an automatic purge sequence. The protection machine also includes a vacuum-chamber cleanup sensor, an emission monitor and an emergency stop control. In addition, the unit has advanced software and tool architecture to maintain safe operations and downstream environmental compliance. GASONICS L 3510 asher is a cost effect, reliable process solution and stands out in the semiconductor industry, providing a comprehensive etching solution with optimal product yield and quality.