Used GASONICS / NOVELLUS L 3510 #9292697 for sale

GASONICS / NOVELLUS L 3510 etcher/asher is a medium-scale dry plasma equipment that allows users to simultaneously etch and asher wafers, creating efficient and precise results. This tool offers a low-pressure, low-energy etching process, which eliminates the need of wet chemicals, costly process steps, and hazardous waste. It is also easy to implement and configure for use in both manual and automated production lines. The etch chamber of the system is constructed from highly engineered resilient aluminum alloy and stainless steel and utilizes an optimized 15 kW RF generator to provide peak power output. The chamber pressure is maintained in a vacuum environment, enabling reactive plasma etching and reducing the risk of particle contamination. The unit is also capable of top-down or bottom-up etching processes for increased accuracy, with the ability to control the magnitude and direction of the etching. Furthermore, the linear, medium-current power supply produces a constant voltage, maintaining uniform etching throughout the wafer and eliminating the need for compensation power cycles. GASONICS L 3510 also offers a wide range of features, including a photomask lift that automatically lifts a photomask to protect delicate surfaces, remote monitoring to keep track of production, and integrated machine diagnostics to troubleshoot any potential issues. Additionally, the process chamber allows for high throughput and large-area etching with no step coverage limit. It also allows for minimized process variations and uniformity, regardless of material type or design. Finally, NOVELLUS L 3510 etcher/asher has a user-friendly graphical user interface that allows for easy operation and optimization, provides real-time feedback, and allows for future upgrades and maintenance. The tool is also designed for use in a variety of industries, including microelectronics, bio-MEMS, and LED, making it a versatile and efficient tool for etching and ashing needs.