Used GASONICS / NOVELLUS L 3510 #9299007 for sale

GASONICS / NOVELLUS L 3510 Etcher / Asher is a precision etching and deposition equipment for advanced processing of high-resolution electronic circuits. The system consists of a cluster of four sections: Process Tool, Micro-Fabrication, Plasma Asher, and Etcher. All the sections are controlled by GASONICS L In-line Process Controller (IPC) in automated mode. The Process Tool is used for controlling the overall unit, including process durations, temperatures, pressure and rates. It also enables two different etching technologies, depending on the application on the wafer. The first technology is wet etching, and the second is dry etching. The wet etching technology is employed in the deposition of metals on the wafer. It has the advantage that it is capable of producing high-resolution, high-annularity etched structures. The Micro-Fabrication section of the machine is used to shape the semiconductor components. It employs a specialized "micro-fabrication" process that allows the operator to shape or etch the components of the wafer in a very precise manner. The Plasma Asher section is employed to "clean" the wafer before any etching process takes place. It makes use of a process known as "Plasma Ashing", which is the process of exposing the wafer to plasma to remove organic contaminants and metal oxide residues. The Plasma Asher also enables post-etch cleaning. The Etcher section is the heart of the tool. It is capable of producing high-resolution fine structures with excellent sidewall definition on the wafer. It supports etching processes such as deep reactive-ion etching (DRIE), plasma-enhanced chemical vapor deposition (PECVD), and reactive-ion etching (RIE). Furthermore, the etcher is designed to handle the most demanding process recipes, with the use of advanced pattern recognition capabilities and three-dimensional projection of production data. GASONICS L 3510 Etcher / Asher asset is highly configurable, enabling users to customize the model to their specific production needs. It features a user-friendly interface that allows the operator to quickly set up and adjust the equipment parameters. Its advanced performance features, combined with the precise etching and sophisticated cleaning technology, make NOVELLUS L 3510 Etcher / Asher a highly efficient and powerful etching and deposition system.